 CT-D Emergency Dry Bed Arbsorber
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The centrotherm Emergency Dry Bed Absorber offers a safe, efficient and reliable abatement solution for the semiconductor, photovoltaic and related industries.
The Emergency Dry Bed Absorber is a system for toxic and flammable
gases such as: H2Se, H2S, NH3, PH3, AsH3 and several others. It is designed (in accordance with CE and Semi S2 guidelines) specifically
for the release of gas from gas cabinets or gas valve boxes and it is able to absorb the whole volume of one gas cylinder. For each gas type an individual granulate is used inside the modules to convert
the gases to inert chemical products.
The new concept is based on a modular design, which allows an adoption to the system to different application parameters such as: Total Gas Capacity, Gas Flow, Gas Type and others. |
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 Features and Benefits
- For each potential gas type a specific granulate is used
- Modular design: - exchange the used modules after a gas release without any contact to the granulate
- - high flexibilty [variable numbers of single modules]
- - Adoption to different application parameters: Total Gas Capacity, Gas Flow, Gas Type, etc.
- Dust emission during the dismantling of the modules is nearly impossible
- High flexibility of design [variable numbers of single modules]
- Developed especially to absorb large quantities of toxic gases
- Meets the requirements of the TA Luft
- Integrated gas and pressure monitoring is possible
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