 CT-Plasma Atmospheric Plasma/Wet Point-of-Use Abatement
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The Atmospheric Plasma point-of-use abatement system is a combination of a µ-wave plasma source with a wet scrubbing section to provide high treatment cpability for PFC's without burner gas. The driving force for the development was to reduce the emission of PFC’s (C2F6, CF4, C3F8, etc.) as perfluorinated carbons are contributing to the global warming process because of their extremely long atmospheric lifetimes even in small mass emissions. Furthermore, due to the fact that neither burn gases nor high electrical power is needed for operation the cost of ownership is minimized compared to existing concepts.
The basic concept of the Atmospheric Plasma Scrubber is the decomposition of PFC’s and their reaction products in the remote plasma followed immediately by a wet scrubbing stage. There is no formation of undesired compounds after the plasma treatment, no risk of HF formation inside the vacuum pump, no corrosion risk and no risk of particulate back-diffusion into the process chamber. |
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 Features and Benefits
- Non-thermal plasma with a high electron temperature
- Only electrical power required, no other energy sources necessary
- High energy density
- Adjustable/tunable to the process needs
- Low operational costs
- Low operational risk compared to other thermal systems
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