 CT-BW Twin Burn/Wet Point-of-Use Abatement
|
|
|
|
|
The CT-BW Twin dual chamber point-of-use abatement system is based on the advanced technology of the CT-BW Series. The growing market requirements for a 100% redundancy for the abatement processes in industrial applications has lead to the dual chamber design of the CT-BW Twin to guarantee maximun uptime for modern semiconductor fabs with lowest CoO. The system arrangement includes two reactors (combustion chambers) operating in the so-called “cold redundancy” mode, one common wet scrubbing section and a common storage tank. In the case of “cold redundancy” the first reactor is in operation and the redundancy is guaranteed by means of activating the second reactor, if the first one is stopped due to system failure and/or service action. The waste gas abatement function will be automatically transferred onto the second reactor and the complete abatement process will remain uninterrupted. |
|
|
 Features and Benefits
- Modular system design
- High corrosion resistance due to use of special materials
- Capable to handle large amounts of deposits
- Extended maintenance interval with short MTTR
- Two full-size wet scrubber sections, flexible to be adapted to different gas loads
- Decoupled recooling system allows hihger energy input for certain applications, e.g. high H2-flows
- Improved service accessibility
- SEMI S2 / CE compliant
- I
|
|
|
|
|
|
Sitemap 
