 |
| Reduction of the fluoride concentration in the wastewater is an important issue. |
|
|
|
|
Reduction of the fluoride concentration in the wastewater is an important issue in the semiconductor and related industries.
HF and fluorides which are generated during plasma etch, chamber clean and at wet benches can cause injuries due to its toxicity. Free fluoride ions are a significant health hazard as they can destroy soft tissues and damage bones. The maximum concentration of the fluorides in the wastewater is defined and limited by the local authorities. Centrotherm has developed a new technology for fluoride wastewater treatment, that allows efficient fluoride concentration reduction in one stage to match the allowed discharge limits. The system size can be reduced significantly to that of a POU system. CT-Flock-F, the newly developed patented flocculating agent, combines several technological steps in one product. Therefore, only one product is needed for efficiently removing fluorides from the wastewater. |
Features and Benefits
- Only one product and one dosing point
- Compact PoU-Solution available
- Significantly reduced CoO
- Neutralization ability coupled with fluoride reduction
- Efficient treatment of heavy metal ions in the wastewater
- Capable to replace existing treatment agents at installed systems
|
|
Applications
- Solutions for processes using PFCs
(HF as a reaction product) - Semiconductor manufacturing
- etch and chamber clean - Other industries (automobile, textile etc.)
- materials plasma cleaning - Solution for the wet processes
(HF as a reagent) - Semiconductor manufacturing - wet benches
- Solar cells manufacturing
- Glass industry
- Ceramics industry
- Metal surface treatment (pickling)
- Electroplating industry
- Galvanic industry
- Paper Industry
|