Clean Solutions

System Overview

CT-BW 2009 Burner Washer/Point-of-Use Abatement

The CT-BW 2009 series point-of-use abatement systems are highly efficient systems used in CVD- and etching applications for photovoltaic, semiconductor and other related industries.

CT-BW Twin Burn/Wet Point-of-Use Abatement

The CT-BW Twin dual chamber point-of-use abatement system is based on the advanced technology of the CT-BW Series. The growing market requirements for a 100% redundancy for the abatement processes in industrial applications has lead to the dual chamber design of the CT-BW Twin to guarantee maximun uptime for modern semiconductor fabs with lowest CoO.

CT-D Dry Bed Absorber/Point-of-Use Abatement

The centrotherm CT-D Dry Bed Absorber offers a safe, efficient and reliable point-of-use abatement solution for the semiconductor, photovoltaic and related industries.

CT-D Emergency Dry Bed Arbsorber

The centrotherm Emergency Dry Bed Absorber offers a safe, efficient and reliable abatement solution for the semiconductor, photovoltaic and related industries.

CT-Plasma Atmospheric Plasma/Wet Point-of-Use Abatement

The Atmospheric Plasma point-of-use abatement system is a combination of a µ-wave plasma source with a wet scrubbing section to provide high treatment cpability for PFC's without burner gas.

CT-W WetScrubber/Point-of-use Abatement

Wet Scrubber systems are a proven solution for the treatment of waste gases emitted in different CVD and etching processes. The new centrotherm clean solutions Wet Scrubber CT-W 2009 has a great advantage over common wet scrubbers: A special CT-W feature reduces up to 99% of the dust particles in the waste gas flow. The absorbed dust particles are discharged with the waste water.

CT-Water Fluoride Wastewater Treatment

Reduction of the fluoride concentration in the wastewater is an important issue in the semiconductor and related industries.

HF and fluorides which are generated during plasma etch, chamber clean and at wet benches can cause injuries due to its toxicity. Free fluoride ions are a significant health hazard as they can destroy soft tissues and damage bones. The maximum concentration of the fluorides in the wastewater is defined and limited by the local authorities.

VOC treatment Volatile Organic Compounds

VOC is a collective name for volatile hydrocarbons, which are characterised through high vapour pressures and low boiling points. The abbreviation VOC stands for “Volatile Organic Compounds“.




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