Particle filter

Products > Waste gas treatment > Dry > CT-PF

The CT-PF particle filter is specifically designed for the semiconductor and photovoltaic industry in order to separate even smallest particles from the exhaust gas flow. One typical application is the particle separation of SiO2 dust which is created during thermal treatment on CVD processes with very high silane flows.

The dust-containing exhaust air is directed across the filter elements. The particles are deposited on the filter surface and cleaned off during regular operation by compressed air pulses. Therefore, the filter elements are divided into several groups, which are individually cleaned as part of a fully automated procedure. During the cleaning process, the surge pressure is kept to a minimum for a constant throughputof air. An integrated FU-controlled fan compensates for oscillations in the differential pressures of the filter elements.

The manual disposal of the collected dust can be performed during operation of the system. The collecting container can be decoupled from the filter by means of a flange and closed with a cover.

- Deposition rate of dust particles > 99,95 %
- Automatic cleaning of filter elements during operation
- Safe disposal of dust even during operation of the equipment
- Compliance with the legal emission threshold value for fine dust of 20 mg / Nm³
- Integrated radial fan with frequency-controlled direct drive
- Quality Made in Germany

- Weighing cells

- Particle-gernerating processes
- Can be combined with our thermal waste gas treatment systems (e.g. burn-wet)

- Photovoltaic
- Semiconductor
- LED-Industry
- Universities and research institutions

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  • Hook-up and installationen
  • Maintenance contract
  • Parts management
  • Warranty service
  • System checks
  • Analysis of operating cost
  • FTIR measurement
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[Translate to Englisch:] Halbleiterchips

References Semiconductor

Numerous well-known semiconductor manufacturers trust on our environmental technologies.

[Translate to Englisch:] Solarzellen

References Photovoltaic

We supply leading photovoltaic manufacturers with equipment for gas and water purification.

[Translate to Englisch:] Chemie

References Research Institutions

We work together with many research institutions and universities around the world and provide them with leading environmental technologies.