Products > Waste gas treatment > Thermal > CT-BW

The CT-BW point-of-use abatement set global standards and is a highly efficient system used in CVD and etching applications for photovoltaic, semiconductor and related industries. As new process tools and technologies with highly corrosive gases and increasing gas loads are introduced, further improvements in abatement technologies are needed.

The CT-BW meets those requirements and is in compliance with international safety standards. Furthermore it provides a couple of advantages such as a high destruction removal efficiency for all waste gases from CVD and etching processes, especially for PFCs as well as all kinds of solid and gaseous reaction by-products.

The system is designed for a reliable, resource- conserving performance even under harsh process conditions. The separation of the functional units such as burner, combustion chamber, wet scrubber, waste gas inlet and cooling system allows a flexible setup for each application. The customized abatement configuration is key to keep the maintenance interval as long as possible and to maximize the uptime.

- Minimizing of operating costs due to process-dependent burner performance
- Flexible system configuration - customized features to your process requirements
- Destruction & Removal Efficiency (DRE) of up to 99,99%
- Low maintenance costs with a high system availability of > 98%
- Comprehensive safety features integrated as standard
- Quality Made in Germany

- Broad spectrum of process-specific equipment features
- Up to four parallel CT-BW modules in one control cabinet
- Customized backup configurations

- CVD processes
- Etch processes
- EPI processes

- Semiconductor
- Photovoltaic
- LED-Industry
- Universities and research institutions

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  • Hook-up and installation
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  • Parts management
  • Warranty service
  • System checks
  • Analysis of operating cost
  • FTIR measurements
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[Translate to Englisch:] Halbleiterchips

References Semiconductor

Numerous well-known semiconductor manufacturers trust on our environmental technologies.

[Translate to Englisch:] Solarzellen

References Photovoltaic

We supply worldwide leading photovoltaic manufacturers with equipment for gas and water purification.

[Translate to Englisch:] Chemie

References Research Institutions

We work together with many research institutions and universities around the world and provide them with leading environmental technologies.

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