CT-D

干式吸附废气处理系统

CT-D干式吸附废气处理系统能够在半导体和光伏行业中安全、高效地处理有害气体。

CT-D是一套被动系统，它不需要特殊的厂务设施供给，仅要求电源和压缩空气或氮气。我们特别设计不同的尺寸具有专利的吸附桶，按照客户不同的要求填充药剂。针对各种不同的工艺气体，我们使用一种或多种不同药剂。药剂吸附有毒、腐蚀性、可燃废气及其副产物。药剂在常温下与废气进行不可逆的化学反应，有害废气转换成不挥发、无机的固体。

为了确保客户生产顺利，我们向全球客户提供完整吸附桶更换和药剂回收服务。

亮点

- 对厂务要求低，药剂寿命长
- 维护需求极低
- 防止堵塞的冷井专利吸附桶设计
- 针对各种工艺应用而特别设计的药剂
- 药剂吸附为化学不可逆反应，所以有害气体不会再次从药剂中释放
- 可安全、简易地更换吸附桶
- 高质量德国制造

可选项

- 不同尺寸的吸附桶

应用

- 研发用途
- 沉积工艺(比如MOCVD)
- 原子层沉积(ALD)工艺
- 蚀刻工艺
- 离子注入工艺
- 铜铟镓硒(CIGS)光伏电池工艺

行业

- 半导体
- 光伏
- LED
- 学府和研究机构

联系表格

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服务

厂务和安装
维护合同
备件管理
质量保证服务
设备定期检查
运行成本分析
FTIR测量
培训

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+49 7344 92494-0
+49 7344 92494-199
info@centrotherm-cs.de

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CT-D

干式吸附废气处理系统

亮点

可选项

应用

行业

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服务

我们非常乐意协助您

centrotherm clean solutions GmbH

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